Large panel deposition system CLUSTERLINE 600
Higher productivity for PLP! More process possibilities. Optimized for advanced packaging.
The "CLUSTERLINE600" is a PVD deposition system specialized for large panels. All platforms share a cluster architecture equipped with cassette-to-cassette processing and fully automated processing. 【Chamber Configuration】 ■ Degassing Chamber ■ Ion Etching ■ Ti Sputtering ■ Cu Sputtering *For more details, please download the PDF (English version) or feel free to contact us.
- Company：Evatec Japan Ltd.
- Price：Other
